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NFPA 318 2018

NFPA 318 2018

$80.71

NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities

Published By Publication Date Number of Pages
NFPA 2018 44
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Improve chemical safety and emergency response using the 2018 edition of NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities. The semiconductor industry continues to advance, requiring new safeguards to address evolving hazards. Reorganized and with major revisions to the requirements for both gas-detection systems as well as smoke detection systems, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled — containing a cleanroom or clean zone or both. Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress. The 2018 edition of NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors. Requirements for gas-detection systems as well as smoke detection systems are technically modified and also revised for clarity. Gas detection criteria are revised to clarify when detection is needed and where it is required to be physically provided. Requirements for detection are revised to include not just minimum capabilities of detectors but also coverage areas, alert and alarm sensitivities, and maximum transport times taken from NFPA 76: Standard for the Fire Protection of Telecommunications Facilities, which were based on research conducted by the Fire Protection Research Foundation. Get the latest requirements for semiconductor fabrication facilities in the 2018 edition of NFPA 318.

PDF Catalog

PDF Pages PDF Title
2 Important Notices and Disclaimers
3 Additional Notices and Disclaimers
7 Chapter 1 Administration
1.1 Scope.
1.2 Purpose.
1.3 Retroactivity.
1.4 Equivalency.
1.5 Units.
8 Chapter 2 Referenced Publications
2.1 General.
2.2 NFPA Publications.
2.3 Other Publications.
2.4 References for Extracts in Mandatory Sections.
9 Chapter 3 Definitions
3.1 General.
3.2 NFPA Official Definitions.
3.3 General Definitions.
11 Chapter 4 Building Construction and Related Services
4.1 General.
4.2 Classification of Occupancy.
4.3 Noncombustible Construction Components.
4.4 Fire Resistance Rating.
4.5 Pass-Throughs in Existing Exit Access Corridors.
4.6 Vertical Openings.
12 4.7 Air Supply and Recirculation Systems.
4.8 Electrical Classification.
4.9 Emergency Power System.
4.10 Means of Egress.
Chapter 5 Hazardous Materials — General Provisions
5.1 Hazardous Chemicals.
5.2 HPM Risk AssesmentAssessment.
13 5.3 Container Delivery.
5.4 Storage and Handling of Hazardous Chemicals.
5.5 Separation of Hazardous Chemicals.
14 5.6 Systems, Equipment, and Processes.
5.7 Supply Piping.
16 5.8 Welding.
Chapter 6 Liquid Chemical Storage and Handling
6.1 General.
6.2 Flammable and Combustible Liquid Delivery Systems.
17 6.3 Spill Protection.
6.4 Pyrophoric Liquids.
18 6.5 Corrosive Liquids.
6.6 Toxic and Highly Toxic Materials.
6.7 OxidizersWater Reactive Chemistries.
6.8 Oxidizers.
Chapter 7 Gas Storage and Handling
7.1 General.
20 7.2 Corrosive Gases.
7.3 Flammable Gases.
7.4 Oxidizing Gases.
7.5 Pyrophoric Gases.
7.6 Silane Systems.
7.7 Toxic and Highly Toxic Gases.
7.8 Unstable Reactive Gases.
7.9 Cryogenic Fluids.
7.10 Bulk Oxygen Systems.
7.11 Gaseous Hydrogen Systems.
7.12 Liquefied Hydrogen Systems.
7.13 Gas Generation Systems.
7.14 Dopant Gas Sources.
21 Chapter 8 Production and Support Equipment
8.1 General.
8.2 Materials of Construction.
8.3 Equipment Safety Systems and Interlocks.
8.4 Electrical Design.
8.5 Process Liquid Heating Equipment.
22 8.6 General Requirements for Tools Using Flammable or Combustible Liquids.
8.7 Photolithography Tools.
8.8 Ion Implanters.
8.9 Wet Process and Wet Etch Tools.
8.10 CVD and Furnace Tools.
23 8.11 Automated Materials Handling Systems (AMHS).
8.12 Support Equipment.
8.13 Production Equipment Fire Protection.
8.14 Exposures.
Chapter 9 Exhaust Systems
9.1 General Exhaust Conditions.
9.2 Local Hazardous Chemical Exhaust System.
9.3 Local Hazardous Chemical Exhaust System Construction.
24 9.4 Hazardous Chemical Exhaust Duct Airflow and Dilution.
9.5 Exhaust Ducts.
9.6 Hazardous Chemical Exhaust Controls.
Chapter 10 Waste Treatment
10.1 Waste Recovery and Handling Systems.
10.2 Acid Waste Treatment Facility Safeguards.
10.3 Organic Waste Treatment Facilities.
10.4 Waste Liquid Handling.
25 10.5 Effluent Treatment Systems.
10.6 Scrubbers.
10.7 Vapor Recovery and Vapor Processing Systems.
Chapter 11 Fire Protection
11.1 Facility-Wide Systems.
26 11.2 Protection of Specific Facility Elements.
28 Chapter 12 General Safety Precautions
12.1 Emergency Plan.
12.2 Emergency Response Team.
12.3 Emergency Drills.
Annex A Explanatory Material
34 Annex B Seismic Protection
Annex C Production and Support Equipment
35 Annex D Informational References

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NFPA 318 2018
$80.71