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ISO 5302:2003

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Vacuum technology — Turbomolecular pumps — Measurement of performance characteristics

Published By Publication Date Number of Pages
ISO 2003-07 20
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ISO 5302:2003 specifies methods for the measurements of performance characteristics of turbomolecular pumps. It is applicable to all sizes and all types of turbomolecular pumps, with mechanical or magnetic bearings, and with or without an additional drag stage.

ISO 5302:2003
$27.30