BSI 20/30360821 DC:2020 Edition
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BS ISO 22278. Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam
Published By | Publication Date | Number of Pages |
BSI | 2020 | 35 |
Status | Definitive |
---|---|
Pages | 35 |
Publication Date | 2020-01-07 |
Standard Number | 20/30360821 DC |
Title | BS ISO 22278. Fine ceramics (advanced ceramics, advanced technical ceramics). Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam |
Identical National Standard Of | ISO/DIS 22278 |
Descriptors | Ceramics, Special ceramics, Test methods, Crystalline state, Quality, Thin films |
Publisher | BSI |
Committee | RPI/13 |
ICS Codes | 81.060.30 - Advanced ceramics |