BS ISO 29301:2017:2018 Edition
$198.66
Microbeam analysis. Analytical electron microscopy. Methods for calibrating image magnification by using reference materials with periodic structures
| Published By | Publication Date | Number of Pages |
| BSI | 2018 | 54 |
This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 2 | National foreword |
| 6 | Foreword |
| 8 | Introduction |
| 9 | 1 Scope 2 Normative references 3 Terms and definitions |
| 13 | 4 Image magnification 4.1 Definition of the image magnification |
| 14 | 4.2 Expressing magnification 5 Reference materials 5.1 General |
| 15 | 5.2 Requirements for CRM/RM 5.3 Storage and handling 6 Calibration procedures 6.1 General |
| 16 | 6.2 Mounting CRM/RM 6.3 Setting TEM operating conditions for calibration |
| 17 | 6.4 Capturing digitized image |
| 18 | 6.5 Digitizing the image recorded on photographic film 6.5.1 General 6.5.2 How to decide the pixel-resolution for digitization |
| 20 | 6.6 Measurement of the angle-corrected distance, Dt, from the digitized image 6.6.1 General |
| 21 | 6.6.2 Measurement procedure |
| 24 | 6.7 Digitization of reference scale for pixel size calibration |
| 25 | 6.8 Calibration of image magnification 6.8.1 General 6.8.2 Calibration of scale unit (= pixel size), S |
| 27 | 6.8.3 Calculating image magnification |
| 28 | 6.9 Calibration of scale bar 6.9.1 General 6.9.2 Basic scale size corresponding to one pixel on the digitized image 6.9.3 Calibration of scale bar |
| 29 | 6.10 Calibration procedure for length measurements using photographic film only |
| 30 | 7 Accuracy of image magnification 8 Uncertainty of measurement result |
| 32 | 9 Calibration report 9.1 General 9.2 Contents of calibration report |
| 34 | Annex A (informative) Parameters that influence the resultant magnification of a TEM |
| 35 | Annex B (informative) Flowchart of image-magnification calibration procedure |
| 36 | Annex C (informative) How to decide the number of lines for averaging |
| 39 | Annex D (informative) Reference materials for magnification calibration |
| 43 | Annex E (informative) Example of test report for calibration of TEM magnification |
| 52 | Bibliography |
