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BS ISO 14237:2000

BS ISO 14237:2000

$142.49

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials

Published By Publication Date Number of Pages
BSI 2000 32
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Status

Withdrawn
Title

Surface chemical analysis. Secondary-ion mass spectrometry. Determination of boron atomic concentration in silicon using uniformly doped materials
Publisher

BSI
Committee

CII/60
Pages

32
Publication Date

2000-04-15
Withdrawn Date

2010-08-31
Replaced By

BS ISO 14237:2010
ISBN

0 580 34674 9
Standard Number

BS ISO 14237:2000
Identical National Standard Of

ISO 14237:2000
Descriptors

Statistical methods of analysis, Surface chemistry, Silicon, Spectroscopy, Calibration, Specimen preparation, Semiconductor technology, Single, Ions, Crystals, Precision, Mathematical calculations, Concentration (chemical), Boron, Isotopes, Homogeneity, Secondary, Control samples, Mass spectrometry, Performance testing, Test equipment, Doping agents, Chemical analysis and testing, Surface properties, Determination of content
ICS Codes 71.040.40 - Chemical analysis
BS ISO 14237:2000
$142.49