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BS EN 62047-13:2012

BS EN 62047-13:2012

$102.76

Semiconductor devices. Micro-electromechanical devices – Bend-and shear-type test methods of measuring adhesive strength for MEMS structures

Published By Publication Date Number of Pages
BSI 2012 18
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This part of IEC 62047 specifies the adhesive testing method between micro-sized elements and a substrate using the columnar shape of the specimens. This international standard can be applied to adhesive strength measurement of microstructures, prepared on a substrate, with width and thickness of 1 μm to 1 mm, respectively.

Micro-sized elements of MEMS devices are made up of laminated fine pattern films on a substrate, which are fabricated by deposition, plating, and/or coating with photolithography. MEMS devices include a large number of interfaces between dissimilar materials, at which delamination occasionally occurs during fabrication or in operation. Combination of the materials at the junction determines the adhesive strength; moreover, defects and residual stress in the vicinity of the interface, which are changing by processing condition, strongly affect the adhesive strength. This standard specifies the adhesive testing method for micro-sized-elements in order to optimally select materials and processing conditions for MEMS devices.

This standard does not particularly restrict test piece material, test piece size and performance of the measuring device, since the materials and size of MEMS device components range widely and testing machine for micro-sized materials has not been generalized.

PDF Catalog

PDF Pages PDF Title
6 English
CONTENTS
7 1 Scope
2 Normative references
3 Terms and definitions
8 4 Test method
4.1 General
Figures
Figure 1 – Columnar test pieces
9 4.2 Data analysis
Figure 2 – Adhesive strength test method
10 5 Test equipment
5.1 General
5.2 Actuator
5.3 Force measurement sensor
5.4 Alignment system
5.5 Recorder
11 6 Test pieces
6.1 Design of test pieces
6.2 Preparation of test pieces
7 Test conditions
7.1 Method for gripping
7.2 Speed of testing
7.3 Alignment of test piece
12 7.4 Test environment
8 Test report
Figure 3 – Alignment between columnar test piece and loading tool
13 Annex A (informative) Technical background
Figure A.1 – Example of the RRT results (see [1])
14 Figure A.2 – Effects of aspect ratio of columnar test piece on the stress conditionin bend type test (see [2])
15 Figure A.3 – Effects of knife edge angle of loading tool and aspect ratioof columnar test piece on the stress condition in bend test
16 Bibliography

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BS EN 62047-13:2012
$102.76