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ASTM-F1367:2003 Edition

ASTM-F1367:2003 Edition

$35.75

F1367-98(2003) Standard Specification for Chromium Sputtering Targets for Thin Film Applications

Published By Publication Date Number of Pages
ASTM 2003 2
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1.1 This specification covers sputtering targets fabricated from chromium metal.

1.2 This specification sets purity grade levels, physical attributes, analytical methods and packaging requirements.

1.3 The values stated in SI units are regarded as standard.

PDF Catalog

PDF Pages PDF Title
1 Scope
Referenced Documents
Terminology
Classification
Ordering Information
Chemical Composition
Physical Properties
Dimensions, Mass, and Permissible Variations
Workmanship, Finish and Appearance
TABLE 1
2 Sampling
Analytical Methods
Certification
Product Marking
Packaging and Package Marking
Keywords
TABLE 2

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