IEC 62047-17:2015
$50.05
Dispositifs à semiconducteurs – Dispositifs-micro électromécaniques – Partie 17 : méthode d’essai de renflement pour la mesure des propriétés mécaniques des couches minces
| Published By | Publication Date | Number of Pages |
| IEC | 2015-03-05 | 58 |
| Published Code | IEC |
|---|---|
| Published By | International Electrotechnical Commission |
| Publication Date | 2015-03-05 |
| Pages Count | 58 |
| Language | France |
| Edition | 1.0 |
| File Size | 1.6 MB |
| ICS Codes | 31.080.99 - Other semiconductor devices |
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