BS EN 62047-3:2006
$86.31
Semiconductor devices. Micro-electromechanical devices – Thin film standard test piece for tensile testing
| Published By | Publication Date | Number of Pages |
| BSI | 2006 | 12 |
Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.
PDF Catalog
| PDF Pages | PDF Title |
|---|---|
| 5 | CONTENTS |
| 6 | 1 Scope 2 Normative references 3 Test piece materials 4 Test piece fabrications |
| 7 | 5 Plane shape of test piece 6 Test piece thickness 7 Gauge mark 8 Test |
| 8 | 9 Document attached to standard test pieces |
| 9 | Annex A (informative) Test piece |
